Nov 5, 2024 · The machine, known as high numerical aperture extreme ultraviolet (High NA EUV) lithography equipment, costs over USD 350 million each and allows semiconductor manufacturers to produce wafers with smaller transistor line widths, according to Nikkei.

Jan 25, 2024 · What is High NA EUV lithography? High NA EUV is the next step in our constant pursuit of shrink. Like NXE systems, it uses EUV light to print tiny features on silicon wafers. And by turning the NA knob, we deliver even better resolution: The new platform, known as EXE, offers chipmakers a CD of 8 nm.

Nov 3, 2024 · The high numerical aperture extreme ultraviolet (High NA EUV) machine, which is said to cost more than $350 million apiece, will allow chip makers to print features smaller than before.

May 9, 2024 · The company’s High NA EUV machine works by hitting droplets of tin heated to approximately 220,000 degrees Celsius (396,032 degrees Fahrenheit) with a laser to create 13.5nm light wavelengths, which do not naturally occur on Earth.

Nov 25, 2024 · High-NA EUV increases the numerical aperture from 0.33 to 0.55, enabling higher resolution on wafers. According to TSMC’s roadmap, High-NA EUV lithography machines will be integrated into its A14 (1.4nm) process node, which is expected to enter mass production in 2027.

在这里解释一下“NA”即光学系统的数值孔径，表示光线的入射角度，使用更大的NA透镜可以打印出更小的结构，目前的EUV光刻机使用的还是NA=0.33的物镜系统，下一代的目标就是NA=0.5及以上的光学系统。 因此，High-NA应运而生。 目前ASML已经开始交付的首款High-NA...

Jun 3, 2024 · After a build and integration period of years, the Lab is ready to provide leading-edge logic and memory chip makers, as well as advanced materials and equipment suppliers access to the first prototype High NA EUV scanner (TWINSCAN EXE:5000) and surrounding processing and metrology tools.

A lot of people connected to the industry have been questioning high NA EUV's profitability. Pat's answer in an interview about it was interesting. We've looked at it pretty carefully - when you go to double patterning versus single patterning with High-NA.

Apr 17, 2024 · ASML , the biggest supplier of equipment to computer chip makers, said on Wednesday said it has shipped one of its newest "High NA" EUV lithography systems to a second customer.

Oct 16, 2024 · ASML has announced the shipment of its third High NA lithography system to a new customer after unexpectedly releasing its financial results ahead of schedule.