For the demonstrated Zygo Newview 100 WLI microscope this is the first objective used, followed by a more recent innovation: the Mirau interferometer, which integrates the reference mirror in such ...

Any type of interferometric objective can be used, including Michelson, Mirau, Linnik, or wide- field [4]-[5] objectives. Figure 1. Schematic representation of Coherence Scanning Interferometry The ...

The performance of the micro-sphere, when incorporated into the 3D micro-device, was evaluated using a Mirau-type coherence scanning interferometer (MCSI) and a calibration grid with a resolving ...

For the first time, the researchers proposed and demonstrated active intensity interferometry for optical synthetic aperture imaging over the kilometer range, according to the paper. The intensity ...