The company offers g/i-Line, KrF excimer laser, ArF excimer laser, and EUV photoresists; wet etching and deep dry etching resist; developer and rinse, and stripping solution; thinner; adhesion ...
This laser was based on a xenon dimer and operated at a wavelength of 172 nm. Today, most industrial excimer lasers operate at wavelengths of 193 nm (ArF), 248 nm (KrF) and 308 nm (XeCl ...
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